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EE8091 MICRO ELECTRO MECHANICAL SYSTEMS Lecture Notes Download EE8091 MICRO ELECTRO MECHANICAL SYSTEMS Lecture Notes Download
Department  Mechanical
Year 4th Year
Semester 8th Semester
University Anna University
Regulation  R2017
Subject Code EE8091
Subject Name MICRO ELECTRO MECHANICAL SYSTEMS
Download File EE8091 MICRO ELECTRO MECHANICAL SYSTEMS Lecture Notes, Books, Important 2 Marks Question and Answers, 16 Mark Question with Answers, Syllabus & Question Bank

 

 

EE8091 MICRO ELECTRO MECHANICAL SYSTEMS Syllabus

UNIT I INTRODUCTION
Intrinsic Characteristics of MEMS – Energy Domains and Transducers- Sensors and Actuators – Introduction to Micro fabrication – Silicon based MEMS processes – New Materials – Review of Electrical and Mechanical concepts in MEMS – Semiconductor devices – Stress and strain analysis – Flexural beam bending- Torsional deflection.

UNIT II SENSORS AND ACTUATORS-I
Electrostatic sensors – Parallel plate capacitors – Applications – Interdigitated Finger capacitor – Comb drive devices – Micro Grippers – Micro Motors – Thermal Sensing and Actuation – Thermal expansion – Thermal couples – Thermal resistors – Thermal Bimorph – Applications – Magnetic Actuators – Micromagnetic components – Case studies of MEMS in magnetic actuators- Actuation using Shape Memory Alloys

UNIT III SENSORS AND ACTUATORS-II
Piezoresistive sensors – Piezoresistive sensor materials – Stress analysis of mechanical elements – Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators – piezoelectric effects – piezoelectric materials – Applications to Inertia , Acoustic, Tactile and Flow sensors.

UNIT IV MICROMACHINING
Silicon Anisotropic Etching – Anisotrophic Wet Etching – Dry Etching of Silicon – Plasma Etching – Deep Reaction Ion Etching (DRIE) – Isotropic Wet Etching – Gas Phase Etchants – Case studies – Basic surface micro machining processes – Structural and Sacrificial Materials – Acceleration of sacrificial Etch – Striction and Antistriction methods – LIGA Process – Assembly of 3D MEMS – Foundry process.

UNIT V POLYMER AND OPTICAL MEMS
Polymers in MEMS– Polimide – SU-8 – Liquid Crystal Polymer (LCP) – PDMS – PMMA – Parylene – Fluorocarbon – Application to Acceleration, Pressure, Flow and Tactile sensors- Optical MEMS – Lenses and Mirrors – Actuators for Active Optical MEMS.

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