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EC8001 MEMS AND NEMS Lecture Notes Download

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EC8001 MEMS AND NEMS Lecture Notes Download EC8001 MEMS AND NEMS Lecture Notes Download
Department  Electronics Communication Engineering
Year 3rd Year
Semester 6th Semester
University Anna University
Regulation  R2017
Subject Code EC8001
Subject Name MEMS AND NEMS
Download File EC8001 MEMS AND NEMS Lecture Notes, Books, Important 2 Marks Question and Answers, 16 Mark Question with Answers, Syllabus & Question Bank

 

 

EC8001 MEMS AND NEMS Syllabus

UNIT I INTRODUCTION TO MEMS AND NEMS
Introduction to Design of MEMS and NEMS, Overview of Nano and Microelectromechanical Systems, Applications of Micro and Nanoelectromechanical systems, Materials for MEMS and NEMS: Silicon, silicon compounds, polymers, metals.

UNIT II MEMS FABRICATION TECHNOLOGIES
Photolithography, Ion Implantation, Diffusion, Oxidation, CVD, Sputtering Etching techniques, Micromachining: Bulk Micromachining, Surface Micromachining, LIGA.

UNIT III MICRO SENSORS
MEMS Sensors: Design of Acoustic wave sensors, Vibratory gyroscope, Capacitive Pressure sensors, Case study: Piezoelectric energy harvester

UNIT IV MICRO ACTUATORS
Design of Actuators: Actuation using thermal forces, Actuation using shape memory Alloys, Actuation using piezoelectric crystals, Actuation using Electrostatic forces, Case Study:RF Switch.

UNIT V NANO DEVICES
Atomic Structures and Quantum Mechanics, Shrodinger Equation, ZnO nanorods based NEMS device: Gas sensor.

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EC8001 MEMS AND NEMS Notes ( UNIT 1 – UNIT 5) – Download

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